TY - CONF T1 - Quantum lithography, entanglement and Heisenberg-limited parameter estimation JO - Journal of Optics B: Quantum and Semiclassical Optics UR - https://doi.org/10.1088/1464-4266/6/8/029 PY - 2004/07/28 AU - Kok P AU - Braunstein SL AU - Dowling JP ED - DO - DOI: 10.1088/1464-4266/6/8/029 PB - IOP Publishing VL - 6 IS - 8 SP - S811 EP - S815 Y2 - 2025/11/04 ER -