@article{article, title  = {{Quantum Interferometric Optical Lithography: Exploiting Entanglement to Beat the Diffraction Limit}},

 publisher = {{American Physical Society (APS)}},

 url = {{https://doi.org/10.1103/physrevlett.85.2733 }},

 year = {{2000}},

 month = {{9}},

 author = {{Boto AN and Kok P and Abrams DS and Braunstein SL and Williams CP and Dowling JP}},

 doi = {{10.1103/physrevlett.85.2733}},

 volume = {{85}},

 journal = {{Physical Review Letters}},

 issue = {{13}},

 pages = {{2733-2736}},

 note = {{Accessed on 2025/11/04}}}