@inproceedings{inproceedings, title = {{Experimental Study of the Impact of SO Phonon Scattering in High-K Gate Dielectric MOSFETs}}, publisher = {{The Electrochemical Society}}, url = {{https://doi.org/10.1149/ma2006-02/22/1088 }}, year = {{2006}}, month = {{1}}, author = {{Atarah S and De Souza MM and Atarah S}}, doi = {{10.1149/ma2006-02/22/1088}}, volume = {{MA2006-02}}, journal = {{ECS Meeting Abstracts}}, issue = {{22}}, pages = {{1088-1088}}, note = {{Accessed on 2025/12/07}}}