@inproceedings{inproceedings, title  = {{Quantum lithography}},

 publisher = {{SPIE}},

 url = {{https://doi.org/10.1117/12.497420 }},

 year = {{2003}},

 month = {{5}},

 author = {{Braunstein SL and Boto AN and Kok P and Abrams DS and Williams CP and Dowling JP}},

 doi = {{10.1117/12.497420}},

 volume = {{5111}},

 journal = {{SPIE Proceedings}},

 pages = {{268-268}},

 note = {{Accessed on 2025/11/04}}}