@article{article, title  = {{3D characterisation of indentation induced sub-surface cracking in silicon nitride using FIB tomography}},

 publisher = {{Elsevier}},

 url = {{}},

 year = {{2019}},

 month = {{10}},

 author = {{Baggott A and Mazaheri M and Inkson BJ}},

 doi = {{10.1016/j.jeurceramsoc.2019.05.012}},

 volume = {{39}},

 journal = {{Journal of the European Ceramic Society}},

 issue = {{13}},

 pages = {{3620-3626}},

 note = {{Accessed on 2026/07/22}}}