@article{article, title = {{3D FIB and AFM mapping on nanoindentation zones}}, url = {{}}, year = {{2011}}, month = {{3}}, author = {{Steer TJ and Möbus G and Kraft O and Wagner T and Inkson BJ}}, volume = {{649}}, journal = {{Materials Research Society Symposium Proceedings}}, pages = {{Q3.7.6}}, note = {{Accessed on 2026/07/21}}}