@article{article, title  = {{New perspectives on nano-engineering by secondary electron spectroscopy in the helium ion and scanning electron microscope}},

 publisher = {{Cambridge University Press (CUP)}},

 url = {{https://eprints.whiterose.ac.uk/id/eprint/127985 }},

 year = {{2018}},

 month = {{6}},

 author = {{Stehling NA and Masters R and Zhou Y and O'Connell R and Holland C and Zhang H and Rodenburg C}},

 doi = {{10.1557/mrc.2018.75}},

 volume = {{8}},

 journal = {{MRS Communications}},

 issue = {{2}},

 pages = {{226-240}},

 note = {{Accessed on 2025/11/03}}}