@inproceedings{inproceedings, title  = {{Development and validation of functional imprint material for the step and flash imprint lithography process}},

 publisher = {{Elsevier BV}},

 url = {{https://doi.org/10.1016/j.mee.2007.12.070 }},

 year = {{2008}},

 month = {{5}},

 author = {{Kettle J and Coppo P and Lalev G and Tattershall C and Dimov S and Turner ML}},

 doi = {{10.1016/j.mee.2007.12.070}},

 volume = {{85}},

 journal = {{Microelectronic Engineering}},

 issue = {{5-6}},

 pages = {{850-852}},

 note = {{Accessed on 2026/09/13}}}