TY  - JOUR

T1  - Capacitively and inductively coupled plasmas for mems applications

JO  - Proceedings of the 7th Biennial Conference on Engineering Systems Design and Analysis Esda 2004

PY  - 2008/11/11

AU  - Lozano-Parada JH

AU  - Zimmerman WBJ

ED  - 

VL  - 3

SP  - 545

EP  - 551

Y2  - 2025/11/01

ER  -