@misc{misc, title  = {{Enhancing Thin-Film Wafer Inspection With A Multi-Sensor Array And Robot Constraint Maintenance}},

 url = {{}},

 year = {{2025}},

 month = {{3}},

 author = {{Sánchez-Arriaga NE and Canzini E and Espley-Plumb NJ and Farnsworth M and Pope S and Leyland A and Tiwari A}},

 doi = {{10.48550/arxiv.2503.05853}},

 note = {{Accessed on 2025/12/15}}}