TY - JOUR T1 - Nanoscale EELS analysis of elemental distribution and band-gap properties in AlGaN epitaxial layers JO - 17TH INTERNATIONAL CONFERENCE ON MICROSCOPY OF SEMICONDUCTING MATERIALS 2011 PY - 2011/11/09 AU - Amari H AU - Zhang HY AU - Geelhaar L AU - Cheze C AU - Kappers MJ AU - Walther T ED - DO - DOI: 10.1088/1742-6596/326/1/012039 VL - 326 Y2 - 2025/12/01 ER -