TY  - CONF

T1  - Novel, 100V, trench super junction high voltage TFTs using low temperature poly crystalline silicon

JO  - Technical Digest International Electron Devices Meeting Iedm

PY  - 2009/12/01

AU  - Dhyani MH

AU  - Green D

AU  - Sweet M

AU  - Narayanan EMS

AU  - Deane SC

AU  - Young ND

ED  - 

DO  - DOI: 10.1109/IEDM.2009.5424386

SP  - 8.7.4

Y2  - 2025/11/24

ER  -