@article{article, title  = {{Characterization of arc discharge plasmas in the combined steered arc/unbalanced magnetron deposition process}},

 url = {{}},

 year = {{2001}},

 month = {{12}},

 author = {{Ehiasarian AP and Macak KA and Schönjahn C and New R and Münz WD}},

 journal = {{Proceedings Annual Technical Conference Society of Vacuum Coaters}},

 pages = {{382-387}},

 note = {{Accessed on 2025/11/03}}}