@article{article, title  = {{Radio-Frequency Hexamethyldisiloxane Plasma Deposition: A Comparison of Plasma- and Deposit-Chemistry}},

 publisher = {{Springer Science and Business Media LLC}},

 url = {{https://doi.org/10.1023/a:1021886217900 }},

 year = {{1997}},

 month = {{1}},

 author = {{Alexander MR and Jones FR and Short RD}},

 doi = {{10.1023/a:1021886217900}},

 volume = {{2}},

 journal = {{Plasmas and Polymers}},

 issue = {{4}},

 pages = {{277-300}},

 note = {{Accessed on 2025/11/30}}}