TY  - JOUR

T1  - Radio-Frequency Hexamethyldisiloxane Plasma Deposition: A Comparison of Plasma- and Deposit-Chemistry

JO  - Plasmas and Polymers

UR  - https://doi.org/10.1023/a:1021886217900

PY  - 1997/01/01

AU  - Alexander MR

AU  - Jones FR

AU  - Short RD

ED  - 

DO  - DOI: 10.1023/a:1021886217900

PB  - Springer Science and Business Media LLC

VL  - 2

IS  - 4

SP  - 277

EP  - 300

Y2  - 2025/11/30

ER  -