@article{article, title  = {{Cyclic deformation and nano-contact adhesion of MEMS nano-bridges by in-situ TEM nanomechanical testing}},

 url = {{}},

 year = {{2010}},

 month = {{8}},

 author = {{Lockwood AJ and Bobji MS and Bunyan RJT and Inkson BJ}},

 doi = {{10.1088/1742-6596/241/1/012056}},

 volume = {{241}},

 journal = {{ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)}},

 note = {{Accessed on 2026/07/21}}}