TY  - JOUR

T1  - Cyclic deformation and nano-contact adhesion of MEMS nano-bridges by in-situ TEM nanomechanical testing

JO  - ELECTRON MICROSCOPY AND ANALYSIS GROUP CONFERENCE 2009 (EMAG 2009)

PY  - 2010/08/09

AU  - Lockwood AJ

AU  - Bobji MS

AU  - Bunyan RJT

AU  - Inkson BJ

ED  - Baker RT

DO  - DOI: 10.1088/1742-6596/241/1/012056

VL  - 241

Y2  - 2026/07/21

ER  -