TY - JOUR T1 - Growth and microstructural stability of epitaxial Al films on (0001) alpha-Al2O3 substrates JO - ACTA MATER PY - 2002/12/03 AU - Dehm G AU - Inkson BJ AU - Wagner T ED - VL - 50 IS - 20 SP - 5021 EP - 5032 Y2 - 2026/07/21 ER -