TY  - CONF

T1  - A study of indium activation in silicon using pseudopotential calculations

JO  - 2004 24TH INTERNATIONAL CONFERENCE ON MICROELECTRONICS, PROCEEDINGS, VOLS 1 AND 2

PY  - 2004/07/28

AU  - Yan X

AU  - Shishkin M

AU  - De Souza MM

ED  - 

SP  - 283

EP  - 286

Y2  - 2025/12/07

ER  -