@inbook{inbook, title  = {{Nanolithography}},

 publisher = {{Wiley}},

 url = {{https://doi.org/10.1002/9780470661345.smc193 }},

 year = {{2012}},

 month = {{1}},

 author = {{Leggett GJ}},

 doi = {{10.1002/9780470661345.smc193}},

 isbn = {{9780470746400}},

 note = {{Accessed on 2025/11/28}}}