@article{article, title = {{Three‐dimensional nanometer structures}}, publisher = {{Wiley}}, url = {{https://doi.org/10.1002/mop.4650060514 }}, year = {{2007}}, month = {{1}}, author = {{Chou C and Gregory DA}}, doi = {{10.1002/mop.4650060514}}, volume = {{6}}, journal = {{Microwave and Optical Technology Letters}}, issue = {{5}}, pages = {{314-319}}, note = {{Accessed on 2026/02/04}}}