TY - JOUR T1 - Three‐dimensional nanometer structures JO - Microwave and Optical Technology Letters UR - https://doi.org/10.1002/mop.4650060514 PY - 2007/01/22 AU - Chou C AU - Gregory DA ED - DO - DOI: 10.1002/mop.4650060514 PB - Wiley VL - 6 IS - 5 SP - 314 EP - 319 Y2 - 2026/02/04 ER -