Electron Probe Microanalysis



Field emission electron probe micro-analyser (EPMA) with enhanced imaging performance capable of quantitative elemental analysis (Be to U) from regions of interest down to 0.1μm. 

Image of JEOL JXA 8530F PLUS


High accuracy chemical analysis and elemental mapping of a wide range of solid state materials such as defects, segregation, and identification of trace elements in: conventional and development alloys and ceramics, nuclear glasses, geological materials, archaeological artefacts, and a whole host of potential industrial applications. 


The JEOL JXA-8530F Plus Hyper Probe, is a state of the art Electron Probe Micro-analyser (EPMA) capable of performing quantitative elemental analysis of small volumes (down to 0.1μm) in solid materials. 

The instrument features an In-Lens Schottky Plus Field Emission Gun (FEG) electron source optimised to provide smaller analytical probe diameters at large probe currents, of the order of micro amps, enhancing the available imaging conditions over a wide range of analytical conditions. 

The FEG source provides improved secondary electron imaging resolutions: 3nm at 30 kV to 50nm at 10 kV. It is therefore especially suited to performing analysis at lower kV, enabling sub-micron analytical spatial resolution of fine grained features. 

The instrument is equipment with 4 X-Ray spectrometers (WDS), three 2 crystal configurations, and one equipped with 4 crystals, providing an analytical range from Be to U. 

In addition, the instrument is fitted with a soft X-ray spectrometer (SXES) offering the possibility to study chemical bonding states in light elements. 

The JXA-8530F Plus also comes with JEOL's 30mm2 silicon-drift detector (SDD). A high count-rate SDD along with an in-situ variable aperture enables EDS analysis at WDS conditions allowing survey analysis particularly useful for unknown samples. 

EDS spectra, maps, and line scans, can be acquired simultaneously with WDS data. 

Equipped with a Panchromatic Cathodluminescene (CL) system to enable high speed assessment of minute concentration differences particularly useful for the examination of minerals and mineral-like samples. 


Detectable element range: WDS: (Be*) / B~U, EDS: B~U

Detectable X-Ray range: Detectable wavelength range with WDS 0.087 to 9.3nm /

Detectable energy range with EDS: 20keV

Number of spectrometers: WDS: 5, SXES: 1 EDS: 1 CL: 1

Maximum specimen size: 100mm x 100mm x 50mm (H)

Accelerating voltage: 1 to 30kV (0.1 kV steps)

Probe current range: 10 - 12 to 5x10-7 A

Probe current stability: +/- 0.3%/h

Secondary electron image resolution: 3 nm (W. D. 11mm, 30 kV)

Minimum probe size: 40 nm (10 kV, 1x10-8 A)/ 100 nm (10 kV, 1x10-7 A) 

Scanning magnification: x40 to x300,000 (W. D. 11mm)

Scanning image resolution: Maximum 5,120 x 3,840 

Large format colour display enabling easy user interface and data analysis. 

Sorby Centre for Electron Microscopy, The University of Sheffield North Campus, Kroto Research Institute, Broad Lane, Sheffield, S3 7HQ

ENQUIRE HERE: royce@sheffield.ac.uk

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